What should be paid attention to when magnetron sputtering coating?
What should be paid attention to when magnetron sputtering coating? The following editor will give you a brief introduction.
1. Radiation: Some coatings need to use radio frequency power, such as high power, need to be shielded. In addition, European standards are embedded with metal wires around the door frame of the single-chamber coating machine to shield radiation;
2. Metal pollution: Some coating materials (such as chromium, indium, aluminum) are harmful to the human body, and special attention should be paid to the dust pollution that occurs during the cleaning of the vacuum chamber;
3. Noise pollution: especially for some large coating equipment, the mechanical vacuum pump is very noisy, and the pump can be isolated outside the wall;
4. Light pollution: In the process of ion coating, gas ionization emits strong light, so it is not suitable to look through the observation window for a long time.