What is the technical principle of the vacuum arc ion coating machine?
The technical principle of the vacuum arc ion coating machine is researched on the basis of the cold cathode vacuum arc discharge theory. And by analyzing the theory of cold cathode vacuum arc discharge, it can be known that electricity transfer can be realized through the mutual influence and restriction between the "positive ion current mechanism" and the "field electron emission mechanism" in the discharge activity. Then the cathode material in this discharge activity needs to evaporate a lot, and the many vapor molecules generated by the activity will generate some positive ions. These ions can generate a super strong electric field near the cathode, thereby promoting the influence of the electrons to trigger the "field electron emission mechanism", and finally The electrons are emitted into the vacuum environment.
The calculation method of the field electron emission current density here is:
Note: E in the calculation formula refers to the cathode electric field intensity; B and C refer to the correlation coefficient with the cathode material; the unit is A/cm.
There are still some difficulties in the theoretical calculation of the current density of the discharge activity of the equipment, because at present it is impossible to establish and solve the balance relationship between the electric quantity, energy and mass in the cathodic arc glow point very accurately.