What are the factors that affect the results of magnetron sputtering coating?

  What are the factors that affect the results of magnetron sputtering coating? Magnetron sputtering is a deposition technique involving gaseous plasma. The plasma gas is generated and confined in a space containing the material to be deposited. The surface of the sputtering target is eroded by the high-energy ions in the plasma and released The atoms pass through the vacuum environment and are deposited on the substrate to form a thin film.

What are the factors that affect the results of magnetron sputtering coating

  Factors Affecting the Results of Magnetron Sputtering Coating

 

  1. The influence of sputtering power. When the substrate and coating materials are determined, the selection of process parameters has a great influence on the growth rate and quality of the coating. The setting of sputtering power has a great influence on both aspects.

 

  2. The influence of gas pressure, magnetron sputtering is high-speed sputtering under low pressure. For this reason, it is necessary to increase the ionization rate of gas to make the gas form plasma. Under the condition that the sputtering power is fixed, the influence of air pressure on magnetron sputtering is analyzed.

 

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