What are the characteristics of the arc evaporation source of the multi-arc ion coating machine?
The principle of arc ion plating is researched on the basis of the theory of cold cathode vacuum arc discharge. The core technology of the multi-arc ion coater is its arc evaporation source. The evaporation source of the multi-arc ion coater is a kind of special cold cathode arc discharge self-evaporation and self-ionization type solid evaporation source.
Compared with the traditional evaporation source, the arc evaporation source of the multi-arc ion coater has obvious characteristics:
1. The coating film has high density, long service life and high strength;
2. As a solid arc evaporation source, its shape, size and position can be changed;
3. Large operating vacuum range;
4. Higher ion energy;
5. High ionization rate up to 60%-80%;
6. High deposition rate, such as TiN, can achieve a high deposition rate of 100nm/s~1000nm/s.
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