The principle of vacuum coating machine and analysis of its components
Vacuum coating machine is currently the most widely used vacuum equipment for making vacuum conditions. It is generally composed of three parts: vacuum chamber, vacuum unit, and electrical control cabinet. The exhaust system adopts "diffusion pump + mechanical pump + roots pump + cryogenic cold trap + polycold" composition. Yishuyuan Hardware Machinery Products specializes in the development and production of vacuum coating equipment. It has an experienced technical team and a high-quality after-sales service team to solve any problems encountered during the use of the equipment. In the following, the composition and working principle of each part of the vacuum coating machine are introduced in detail.
1. Vacuum main body——The size of the vacuum chamber varies according to the requirements of the processed products. At present, the most widely used diameters are 1.3M, 0.9M, 1.5M, 1.8M, etc. The chamber is made of stainless steel" target= _blank>Stainless steel material, requirements are not rusty, solid, etc., each part of the vacuum chamber has a connection valve to connect each pump.
2. Auxiliary air extraction system: The exhaust system is an important part of the vacuum system of the coating machine, which is mainly composed of mechanical pumps, booster pumps (mainly introduces Roots pumps), and oil diffusion pumps. This exhaust system is composed of "diffusion pump + mechanical pump + roots pump + cryogenic cold trap + polycold". The exhaust process is: the mechanical pump first pumps the vacuum chamber to a low vacuum state of less than 2.0*10-2PA, which provides a prerequisite for the subsequent vacuuming of the diffusion pump, and then when the diffusion pump pumps the vacuum chamber, the mechanical pump cooperates with the oil diffusion The pumps are connected in series to complete the pumping action in this way.
Mechanical pump: also called backing pump. Mechanical pump is the most widely used low vacuum pump. It uses oil to maintain the sealing effect and relies on mechanical methods to continuously change the volume of the suction cavity in the pump to make the container pumped. The volume of the gas inside is continuously expanded to obtain a vacuum.