How to use vacuum coating machine
Let's take a look at how to use the vacuum coating machine.
Electric control cabinet operation
1. Turn on the water pump and air source.
2. Turn on the main power supply.
3. Turn on the power supply of the maintenance pump and the vacuum gauge, the vacuum gauge position V1, wait for the value to be less than 10, and then enter the next step. It takes about 5 minutes.
4. Turn on the mechanical pump, pre-pump, turn on the turbomolecular pump power, and start it, switch the vacuum gauge switch to the V2 position, and it will take about 20 minutes to pump down to less than 2.
5. After observing that the reading of the turbomolecular pump reaches 250, turn off the pre-pump, turn on the backing pump and the high vacuum valve to continue vacuuming. After the vacuum reaches a certain level, turn on the high vacuum gauge on the right to observe the vacuum. The power of the electron gun can be turned on after the vacuum reaches 2×10-3.
1. Total power supply.
2. Turn on the electron gun control Ⅰ and electron gun control Ⅱ power supply at the same time: press the electron gun control Ⅰ power, delay switch, the delay, power and protection lights are on, after three minutes, the delay and protection lights are off, if the back door is not closed or the water flow relay has Failure, the protection light will always be on.
3. When the high voltage is turned on, the high voltage will reach more than 10KV, the beam current can be adjusted to about 200mA, the curtain grid is 20V/100mA, the filament current is 1.2A, and the deflection current swings between 1 and 1.7.
1. Turn off the high vacuum meter and molecular pump.
2. When the molecular pump displays to 50, turn off the high valve, the front stage, and the mechanical pump in sequence. It takes about 40 minutes during this period.
3. When it is below 50, turn off the maintenance pump again.