Classification of films on vacuum coating machines

Vacuum coating machines are mainly classified into two major categories: evaporation deposition coating and sputtering deposition coating, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, sol-gel method and so on.

 

FOR EVAPORATION COATING

 

Generally, the target is heated to evaporate the surface components in the form of radicals or ions.

Thickness uniformity mainly depends on:

1. The degree of lattice matching between the substrate material and the target material

2. The surface temperature of the substrate

3. Evaporating power and rate

4. Vacuum

5. Coating time and thickness.

Classification of films on vacuum coating machines

Component uniformity:

 

The uniformity of the evaporation coating composition is not easy to guarantee. The specific factors that can be adjusted are the same as above. However, due to the limitation of the principle, the uniformity of the evaporation coating composition is not good for non-single-component coatings.

 

Uniformity of crystal orientation:

 

1. Lattice matching

2. Substrate temperature

3. Evaporation rate

 

There are many types of sputtering coating. Generally speaking, the difference from evaporation coating is that the sputtering rate will become one of the main parameters.

 

The laser sputtering coating pld in the sputtering coating is easy to maintain the uniformity of the composition, but the thickness uniformity of the atomic scale is relatively poor (because it is pulse sputtering), and the control of the crystal orientation (outer edge) growth is also relatively general.

wdh-site

FOLLOW US

wdh-site wdh-site wdh-site
wdh-site

+86-13725889351

wdh-site

cassie@ysuymachine.com

Dongguan Yishuyuan Hardware Machinery Products Co., Ltd. Support By Hangzhou Great Master

qirui

Contact Us

Contact Us

qirui
Send