Classification of films on vacuum coating machines
Vacuum coating machines are mainly classified into two major categories: evaporation deposition coating and sputtering deposition coating, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, sol-gel method and so on.
FOR EVAPORATION COATING
Generally, the target is heated to evaporate the surface components in the form of radicals or ions.
Thickness uniformity mainly depends on:
1. The degree of lattice matching between the substrate material and the target material
2. The surface temperature of the substrate
3. Evaporating power and rate
5. Coating time and thickness.
The uniformity of the evaporation coating composition is not easy to guarantee. The specific factors that can be adjusted are the same as above. However, due to the limitation of the principle, the uniformity of the evaporation coating composition is not good for non-single-component coatings.
Uniformity of crystal orientation:
1. Lattice matching
2. Substrate temperature
3. Evaporation rate
There are many types of sputtering coating. Generally speaking, the difference from evaporation coating is that the sputtering rate will become one of the main parameters.
The laser sputtering coating pld in the sputtering coating is easy to maintain the uniformity of the composition, but the thickness uniformity of the atomic scale is relatively poor (because it is pulse sputtering), and the control of the crystal orientation (outer edge) growth is also relatively general.